OP2600设备完整不缺件,已翻新;
Fully refurbished system for 150 & 200mm wafer
TFMS version: V3.31a7 based on DOS
Measurement tool : BPR, BPE, VAS
BPR - Beam Profile Reflectometry : still the best way to characterize dielectric
films
BPE - TWI patented Beam Profile Ellipsometer
VAS(Visible Spectroscopy) : 470-800 nm
SBC board with CPU Pentium Ⅲ 600 MHz
Cognex 3000
Overhauled all systems and Robot,Controller(ESC200) |
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