FPA-5500iZ+12"设备完整不缺件,在欧洲;
Block 2:- 4x Coater Unit (IC Cup) - 4 Resist Lines / coater Unit - 11 Resist pumps "RGEN01" with Entegris Filter Manifold - 1x RRC / EBR nozzle / coater unit - Back Rinse Nozzle standard- 2x adhesion (ADH) unit- 5x chill plate (CPL)- 6x standard hot plate (LHP)- 3x high temperature hot plate (HHP)- 2x Cup wash holder unit incl. Cup wash disc- 1x Transfer unit (TRS)- 1x Transfer chill plate (TCP)Block 3:- 4x Developer unit - 2 Developer Lines (SH - Nozzle) / u
咨询此设备请加我微信
